Water Chiller for Semiconductor Equipment

Discover the future of semiconductor manufacturing with EVRCOOL’s water chillers, designed to elevate your equipment’s performance to new heights. In the world of semiconductor fabrication, precision and stability are paramount. EVRCOOL advanced chillers provide a constant and controlled flow of chilled water, crucial for maintaining the right temperature balance in your equipment. This enhances the performance and efficiency of your semiconductor tools. Whether you’re dealing with delicate wafer fabrication or intricate chip design, our chillers ensure that your equipment operates at its peak, delivering consistent results.

The EVRCOOL Chiller

Unparalleled reliability

Designed for longevity in mind, EVRCOOL chillers utilize:

  • Purpose built printed circuit boards to minimize electrical connection points.  
  • Formed 304 stainless steel tubing to eliminate most connectors and threaded joints in the hydraulic circuit.
  • Tandem compressors that automatically rotate under part load conditions to extend the compressor life.
  • Stainless brazed heat exchangers for long-term DI water compatibility
  • Optics circuits with sealless magnetic drive variable speed pumps, prefilters, and suction pressure sensors to prevent pump cavitation.
  • Laser circuits with variable speed pumps and fluid prefilters
  • Active DI water control circuit to maximize DI filter life and minimize component erosion

EVRCOOL chillers seamlessly integrate with a multitude of systems, allowing compatibility with a wide range of setups. With variable speed fans and pumps and tandem compressors that intelligently adjust to customer-specific operating conditions, our chillers optimize energy consumption and efficiency.

Designed for serviceability

Uniquely designed with attention to longevity and serviceability, EVRCOOL chillers have:

  • A patent pending condenser access door that provides easy access to service the chiller mechanical components
  • A patent pending sliding refrigeration skid assembly that enables the refrigeration system to be quickly removed from the chiller for service without unbrazing copper fittings
  • Electronic sensors that provide remote monitoring and diagnostic data for the hydraulic and refrigeration systems
  • A valved quick connect fitting for draining the tank
  • A folding access door for filling the tank

Semiconductor Equipment Compatibility:

Photolithography Equipment

Ion Implantation Equipment

Chemical Vapor Deposition (CVD) Systems

Plasma Etching Equipment

Wafer Steppers and Scanners

Dry Etching Equipment

Diffusion Furnaces


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Application Flexibility

EVRCOOL’s industrial chillers seamlessly integrate into a multitude of industrial settings, providing reliable and efficient cooling solutions across a wide range of operational scenarios. Whether facing varying environmental conditions or dynamic heat load demands, EVRCOOL's industrial process chillers deliver unmatched performance and adaptability, making them the top choice for industries seeking versatile and future-proof cooling solutions.